Počet záznamů: 1
Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide
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SYSNO ASEP 0343204 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide Tvůrce(i) Novotný, Michal (FZU-D) RID, ORCID, SAI
Bulíř, Jiří (FZU-D) RID, ORCID, SAI
Pokorný, Petr (FZU-D) RID, ORCID, SAI
Bočan, Jiří (FZU-D) RID
Fitl, Přemysl (FZU-D) RID, ORCID
Lančok, Ján (FZU-D) RID, ORCID
Musil, Jindřich (FZU-D) RID, ORCIDZdroj.dok. Journal of Optoelectronics and Advanced Materials. - : NATL INST OPTOELECTRONICS - ISSN 1454-4164
Roč. 12, č. 3 (2010), 697-700Poč.str. 4 s. Jazyk dok. eng - angličtina Země vyd. RO - Rumunsko Klíč. slova reactive magnetron sputtering ; alumina ; plasma spectroscopy ; mass spectroscopy ; optical emission spectroscopy Vědní obor RIV BH - Optika, masery a lasery CEP IAA100100718 GA AV ČR - Akademie věd KAN400100653 GA AV ČR - Akademie věd GP202/09/P324 GA ČR - Grantová agentura ČR CEZ AV0Z10100522 - FZU-D (2005-2011) UT WOS 000277827900057 EID SCOPUS 77950638049 Anotace Optical emission spectroscopy (OES) and mass spectrometry were used for plasma investigation of DC pulsed reactive magnetron sputtering of aluminium oxide. Aluminium target was sputtered in a reactive oxygen/argon atmosphere. Special attention was paid to the transition from the dielectric to metallic mode. Mass spectra were recorded at the substrate. OES spectra were taken at the target and at the substrate. Both mass and emission spectra obtained in the transition mode revealed distinct changes in plasma composition (O, O2, Al and AlO plasma species and corresponding positive ions). The transition from the dielectric to metallic mode is followed by a decrease of atomic oxygen intensity, while the intensity of aluminium species increases. AlO molecule appeared in the mass spectra only. Pracoviště Fyzikální ústav Kontakt Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Rok sběru 2011
Počet záznamů: 1