Počet záznamů: 1

Electron beam induced current measurement on a specimen biased in a cathode lens

SYSNO ASEP	0335265
Druh ASEP	C - Konferenční příspěvek (mezinárodní konf.)
Zařazení RIV	D - Článek ve sborníku
Název	Electron beam induced current measurement on a specimen biased in a cathode lens
Tvůrce(i)	Horáček, Miroslav (UPT-D)_{RID, ORCID, SAI} Zobač, Martin (UPT-D)_{RID, ORCID} Vlček, Ivan (UPT-D)_{RID, ORCID, SAI}
Celkový počet autorů	3
Zdroj.dok.	MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy. - Graz : Verlag der Technischen Universität, 2009 - ISBN 978-3-85125-062-6
Rozsah stran	vol. 1: 211-212
Poč.str.	2 s.
Akce	MC 2009 - Joint Meeting of Dreiländertagung and Multinational Congress on Microscopy /9./
Datum konání	30.08.2009-04.09.2009
Místo konání	Graz
Země	AT - Rakousko
Typ akce	WRD
Jazyk dok.	eng - angličtina
Země vyd.	AT - Rakousko
Klíč. slova	elektron beam induced current ; SEM ; very low energy electrons ; cathode lens ; specimen bias
Vědní obor RIV	JA - Elektronika a optoelektronika, elektrotechnika
CEP	IAA100650803 GA AV ČR - Akademie věd
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Anotace	The retarding potential between the specimen and an anode, a cathode lens, is already commonly used for high resolution imaging at very low electron beam energies, even below 10 eV, in a scanning electron microscope (SEM). Standard configuration consists of an electron column (either magnetic or electrostatic), YAG single-crystal scintillator positioned under the objective lens, used as an anode, and an insulated specimen used as a cathode of the cathode lens. The microscope with the cathode lens can be used not only to acquire standard signals as secondary electrons (SE) and backscattered electrons (BSE); transmitted electrons (STEM) and electron beam induced current (EBIC) can be used as well. Two problems are addressed. First, we have to bring a high voltage on the insulated specimen in the microscope chamber, and second, we have to solve the induced current measurement on the high voltage level.
Pracoviště	Ústav přístrojové techniky
Kontakt	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Rok sběru	2010

Počet záznamů: 1