Počet záznamů: 1
Collection of secondary electrons in scanning electron microscopes
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SYSNO ASEP 0333617 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Collection of secondary electrons in scanning electron microscopes Tvůrce(i) Müllerová, Ilona (UPT-D) RID, SAI, ORCID
Konvalina, Ivo (UPT-D) RID, ORCID, SAICelkový počet autorů 2 Zdroj.dok. Journal of Microscopy. - : Wiley - ISSN 0022-2720
Roč. 236, č. 3 (2009), s. 203-210Poč.str. 8 s. Jazyk dok. eng - angličtina Země vyd. GB - Velká Británie Klíč. slova detection of electrons ; magnetic lenses ; secondary electrons ; SEM Vědní obor RIV JA - Elektronika a optoelektronika, elektrotechnika CEP OE08012 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy IAA100650803 GA AV ČR - Akademie věd CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000271974200006 DOI 10.1111/j.1365-2818.2009.03189.x Anotace Collection of the secondary electrons in the scanning electron microscope was simulated and the results have been experimentally verified for two types of the objective lens and three detection systems. The aberration coefficients of both objective lenses as well as maximum axial magnetic fields in the specimen region are presented. Compared are a standard side-attached secondary electron detector, in which only weak electrostatic and nearly no magnetic field influence the signal trajectories in the specimen vicinity, and the side-attached (lower) and upper detectors in an immersion system with weak electrostatic but strong magnetic field penetrating towards the specimen. The collection efficiency was calculated for all three detection systems and several working distances. The ability of detectors to attract secondary electron trajectories for various initial azimuthal and polar angles was calculated, too. Pracoviště Ústav přístrojové techniky Kontakt Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Rok sběru 2010
Počet záznamů: 1