Počet záznamů: 1
Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering
- 1.Lundin, D. - Čada, Martin - Hubička, Zdeněk
Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering.
Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. Roč. 34, č. 4 (2016), 1-10, č. článku 041305. ISSN 0734-2101. E-ISSN 1520-8559
Impakt faktor: 1.374, rok: 2016
http://hdl.handle.net/11104/0268241
Počet záznamů: 1