Počet záznamů: 1
Determination of proximity effect forward scattering range parameter in e-beam lithography
- 1.Urbánek, Michal - Kolařík, Vladimír - Král, Stanislav - Dvořáková, Marie
Determination of proximity effect forward scattering range parameter in e-beam lithography.
Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2010 - (Mika, F.), s. 67-68. ISBN 978-80-254-6842-5.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./. Skalský dvůr (CZ), 31.05.2010-04.06.2010]
http://arl-repository.lib.cas.cz/uloziste_av/UPT-D/cav_un_epca-0350671_01.pdf
http://hdl.handle.net/11104/0190611
Počet záznamů: 1