Počet záznamů: 1
Measurement of total energy flux density at a substrate during TiO.sub.x./sub. thin film deposition by using a plasma jet system
- 1.Čada, Martin - Virostko, Petr - Kment, Štěpán - Hubička, Zdeněk
Measurement of total energy flux density at a substrate during TiOx thin film deposition by using a plasma jet system.
Vacuum. Roč. 83, č. 4 (2009), s. 738-744. ISSN 0042-207X. E-ISSN 1879-2715
Impakt faktor: 0.975, rok: 2009
http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TW4-4SJ2WRT-2&_user=625012&_rdoc=1&_fmt=&_orig=search&_sort=d&view=c&_acct=C000031722&_vers
http://hdl.handle.net/11104/0179088
Počet záznamů: 1