Počet záznamů: 1
Time-resolved diagnostics of dual high power impulse magnetron sputtering with pulse delays of 15 μs and 500 μs
- 1.Straňák, V. - Drache, S. - Čada, Martin - Hubička, Zdeněk - Tichý, M. - Hippler, R.
Time-resolved diagnostics of dual high power impulse magnetron sputtering with pulse delays of 15 μs and 500 μs.
Contributions to Plasma Physics. Roč. 51, 2-3 (2011), s. 237-245. ISSN 0863-1042. E-ISSN 1521-3986
Impakt faktor: 1.108, rok: 2011
http://hdl.handle.net/11104/0197343
Počet záznamů: 1