Estimation of mechanical parameters of thin films using finite element analysis

0494051 - ÚFM 2019 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Tinoco Navaro, Hector Andres - Holzer, Jakub - Pikálek, Tomáš - Buchta, Zdeněk - Lazar, Josef - Chlupová, Alice - Kruml, Tomáš - Hutař, Pavel
Estimation of mechanical parameters of thin films using finite element analysis.
Applied Mechanics 2018. Plzeň: Západočská univerzita v Plzni, 2018 - (Lukeš, V.; Rendl, J.; Hajžman, M.; Byrtus, M.), s. 157-162. ISBN 978-80-261-0766-8.
[International Conference Applied Mechanics /20./. Myslovice (CZ), 09.04.2018-11.04.2018]
Grant CEP: GA MŠMT(CZ) EF16_013/0001823
Institucionální podpora: RVO:68081723 ; RVO:68081731
Klíčová slova: bulge test * thin film * finite element analysis * elastic properties
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.); Optics (including laser optics and quantum optics) (UPT-D)

This study shows a methodology to estimate mechanical parameters of thin films by means of a bulge
test and a numerical approach. The methodology is based on the combination of finite element analysis with a
classical analytical method. Finite element modelling was conducted for monolayer (Si3N4) membranes of 2x2mm
with the aim to approximate both the load-deflection curves experimentally measured and the classical loaddeflection
analytical model. Error functions were constructed and minimized to delimit a coupled solution space
between Young’s modulus and Poison’s ratio. In a traditional bulge test analysis only one of the elastic properties
can be determined due to that there is not unique solution in the estimations of these parameters. However, both
elastic parameters were determined through the proposed numerical procedure which compares the deformed
surfaces for a specific set of optimal elastic parameters computed. Results shows that the estimated elastic
properties agree with corresponding values determined by other methods in the literature
Trvalý link: http://hdl.handle.net/11104/0289462