Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope

0451582 - ÚPT 2016 RIV US eng J - Článek v odborném periodiku
Radlička, Tomáš
Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope.
Microscopy and Microanalysis. Roč. 21, S4 (2015), s. 212-217. ISSN 1431-9276. E-ISSN 1435-8115
Grant CEP: GA MŠMT(CZ) LO1212
Institucionální podpora: RVO:68081731
Klíčová slova: scanning electron microscope * optical calculation
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Impakt faktor: 1.730, rok: 2015

A wave optical calculation of the probe size of a low energy scanning electron microscope is presented. The resolution for the optimal aperture was computed and compared with results of standard approaches. The effect of deflection aberrations is also considered, and it was found to be critical for the landing energies below 5eV and fields of view larger than 100 x 100 pím2.
Trvalý link: http://hdl.handle.net/11104/0252721