Fabrication of thin-metal microparticles using lift-off photolithography

0437879 - ÚIACH 2015 HU eng A - Abstrakt
Novotný, Jakub - Kupčík, R. - Jusková, Petra - Bílková, Z. - Foret, František
Fabrication of thin-metal microparticles using lift-off photolithography.
30th International Symposium on Microscale Bioseparations. Book of Abstracts. University of Pécs, 2014 - (Kiliár, F.; Kiss, I.; Nagy, L.; Pap, V.). s. 133-134. ISBN 978-963-642-599-9.
[International Symposium on MicroScale Bioseparations /30./. 27.04.2014-01.05.2014, Pécs]
Grant CEP: GA ČR(CZ) GAP301/11/2055
Institucionální podpora: RVO:68081715
Klíčová slova: lift-off photolithography * metal sputtering
Kód oboru RIV: CB - Analytická chemie, separace

This poster presents simple method of preparation of thin-metal particles utilizing lift-off photolithography and metal sputtering.
Trvalý link: http://hdl.handle.net/11104/0241365