Počet záznamů: 1
Automated system for optical inspection of defects in resist coated non-patterned wafer.
- 1.0512149 - ÚPT 2020 JO eng A - Abstrakt
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated system for optical inspection of defects in resist coated non-patterned wafer.
Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
[The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
Grant CEP: GA MPO FV10618
Institucionální podpora: RVO:68081731
Klíčová slova: dielectric surface inspection * resist coated wafer
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Trvalý link: http://hdl.handle.net/11104/0302361
Počet záznamů: 1