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Automated system for optical inspection of defects in resist coated non-patterned wafer.

  1. 1.
    0512149 - ÚPT 2020 JO eng A - Abstrakt
    Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
    Automated system for optical inspection of defects in resist coated non-patterned wafer.
    Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
    [The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
    Grant CEP: GA MPO FV10618
    Institucionální podpora: RVO:68081731
    Klíčová slova: dielectric surface inspection * resist coated wafer
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
    Trvalý link: http://hdl.handle.net/11104/0302361
     
     
Počet záznamů: 1