Počet záznamů: 1
Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering
- 1.LUNDIN, D., ČADA, M., HUBIČKA, Z. Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering. Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. 2016, 34(4), 1-10), 041305. ISSN 0734-2101. E-ISSN 1520-8559. Dostupné z: doi: 10.1116/1.4953033
Počet záznamů: 1