Počet záznamů: 1
The combined technological methods for deposition of Si:H thin films and structures with in situ embedded nanoparticles
- 1.STUCHLÍK, J., STUCHLÍKOVÁ, T.-H., REMEŠ, Z., PURKRT, A., FAJGAR, R., KOŠTEJN, M., ZHURAVLEV, K., KUPČÍK, J., SVESHNIKOVA, L., GALKIN, K.N., GALKIN, N.G. The combined technological methods for deposition of Si:H thin films and structures with in situ embedded nanoparticles. Advanced Science, Engineering and Medicine. 2015, 7(4), 265-269. ISSN 2164-6627. Dostupné z: doi: 10.1166/asem.2015.1689
Počet záznamů: 1