Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures

URBÁNEK, M., MATĚJKA, M., KOLAŘÍK, V., HORÁČEK, M., KRÁTKÝ, S., BOK, J., CHLUMSKÁ, J., MIKŠÍK, P., VAŠINA, J. Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures. In: 39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. Cambridge: University of Cambridge, 2013, s. 582.