Thermal Desorption Spectroscopy Study on Diamond-like Carbon Films Modified by Silicon, Oxygen or Nitrogen

BURSÍKOVÁ, V., SŤAHEL, P., GARDELKA, T., BOCHNICEK, Z., PEŘINA, V., HAVRÁNEK, V., MIKŠOVÁ, R. Thermal Desorption Spectroscopy Study on Diamond-like Carbon Films Modified by Silicon, Oxygen or Nitrogen. In: ORSZÁGH, J., PAPP, P., MATEJČÍK, Š., eds. SAPP 18th Symposium on Application of Plasma Processes SAPP XVIII. Workshop on Plasmas as a Planetary. Bratislava: Department of Experimental Physics, Faculty of Mathematics,, 2011, pp.347-pp.402. ISBN 978-80-89186-77-8.