Počet záznamů: 1
Time-resolved diagnostics of dual high power impulse magnetron sputtering with pulse delays of 15 μs and 500 μs
- 1.STRAŇÁK, V., DRACHE, S., ČADA, M., HUBIČKA, Z., TICHÝ, M., HIPPLER, R. Time-resolved diagnostics of dual high power impulse magnetron sputtering with pulse delays of 15 μs and 500 μs. Contributions to Plasma Physics. 2011, 51(2-3), 237-245. ISSN 0863-1042. E-ISSN 1521-3986. Dostupné z: doi: 10.1002/ctpp.201000065
Počet záznamů: 1