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Multiaxis interferometric system for positioning in nanometrology
- 1.LAZAR, J., ČÍP, O., ČÍŽEK, M., HRABINA, J., ŠERÝ, M., KLAPETEK, P. Multiaxis interferometric system for positioning in nanometrology. In: Proceedings of the 9th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic. Sofia: WSEAS EUROPMENT Press, 2010, s. 92-95. ISBN 978-954-92600-3-8. ISSN 1790-5117.
Počet záznamů: 1