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Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina
- 1.POKORNÝ, P., BULÍŘ, J., LANČOK, J., MUSIL, J., NOVOTNÝ, M. Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina. Plasma Processes and Polymers. 2010, 7(11), 910-914. ISSN 1612-8850. E-ISSN 1612-8869. Dostupné z: doi: 10.1002/ppap.201000064
Počet záznamů: 1