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Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model
- 1.NAVRÁTIL, Z., DVOŘÁK, P., BRZOBOHATÝ, O., TRUNEC, D. Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model. Journal of Physics D-Applied Physics. 2010, 43(Nov 3), 505203:1-11. ISSN 0022-3727. E-ISSN 1361-6463. Dostupné z: doi: 10.1088/0022-3727/43/50/505203
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