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Determination of proximity effect forward scattering range parameter in e-beam lithography
- 1.URBÁNEK, M., KOLAŘÍK, V., KRÁL, S., DVOŘÁKOVÁ, M. Determination of proximity effect forward scattering range parameter in e-beam lithography. In: MIKA, F., ed. Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2010, s. 67-68. ISBN 978-80-254-6842-5.
Počet záznamů: 1