Deposition of PZT thin films on copper-coated polymer foils

SUCHANECK, G., HUBIČKA, Z., JASTRABÍK, L., DEJNEKA, A., KISELEV, D., BDIKIN, I., KHOLKIN, A., GERLACH, G. Deposition of PZT thin films on copper-coated polymer foils. In: GREER, J.R., VLASSAK, J., DANIEL, J., TSUI, T., eds. Relability and Properties of Electronic Devices on Flexible Substrates (Simposium I at the 2008 MRS Fall Meeting). Warrendale, PA: MRS, 2009, I0305/1-I0305/2. Materials Research Society Symposium Proceedings, 1116. ISBN 9781615673834. Dostupné z: http://www.proceedings.com/06086.html