Počet záznamů: 1  

Profiling of N-type dopants in silicon structures

  1. 1. Hovorka, M., Mika, Filip, Frank, Luděk. Profiling of N-type dopants in silicon structures. In: MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy. Graz: Verlag der Technischen Universität, 2009, Vol. 1: 181-182. ISBN 978-3-85125-062-6. [MC 2009 - Joint Meeting of Dreiländertagung and Multinational Congress on Microscopy /9./, Graz, 30.08.2009-04.09.2009, AT]. Dostupné z: http://www.univie.ac.at/asem/Graz_MC_09/papers/19923.pdf.