Physical properties of homogeneous TiO.sub.2./sub. films prepared by high power impulse magnetron sputtering as a function of crystallographic phase and nanostructure

STRAŇÁK, V., ČADA, M., QUAAS, M., BLOCK, S., BOGDANOWICZ, R., KMENT, Š., WULFF, H., HUBIČKA, Z., HELM, C.A., TICHÝ, M., HIPPLER, R. Physical properties of homogeneous TiO₂ films prepared by high power impulse magnetron sputtering as a function of crystallographic phase and nanostructure. Journal of Physics D-Applied Physics. 2009, 42(10), 105204/1-105204/12. ISSN 0022-3727. E-ISSN 1361-6463. Dostupné z: doi: 10.1088/0022-3727/42/10/105204