Measurement of total energy flux density at a substrate during TiO.sub.x./sub. thin film deposition by using a plasma jet system

ČADA, M., VIROSTKO, P., KMENT, Š., HUBIČKA, Z. Measurement of total energy flux density at a substrate during TiO_x thin film deposition by using a plasma jet system. Vacuum. 2009, 83(4), 738-744. ISSN 0042-207X. E-ISSN 1879-2715. Dostupné z: doi: 10.1016/j.vacuum.2008.05.014.