Space resolved optical emission spectroscopy during deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films by double hollow cathode plasma Jet system

OLEJNÍČEK, J., HUBIČKA, Z., ČADA, M., VIROSTKO, P., KMENT, Š., ADÁMEK, P., JASTRABÍK, L., DEJNEKA, A. Space resolved optical emission spectroscopy during deposition of Ba_xSr_1-xTiO₃ thin films by double hollow cathode plasma Jet system. Materials Science Forum. 2009, 609(-), 105-109. ISSN 0255-5476. Dostupné z: doi: 10.4028/3-908454-02-6.105