Crystallographic properties of grain size-controlled polycrystalline silicon thin films deposited on alumina substrate

OGANE, A., HONDA, S., URAOKA, Y., FUYUKI, T., FEJFAR, A., KOČKA, J. Crystallographic properties of grain size-controlled polycrystalline silicon thin films deposited on alumina substrate. Journal of Crystal Growth. 2009, 311(3), 789-793. ISSN 0022-0248. E-ISSN 1873-5002. Dostupné z: doi: 10.1016/j.jcrysgro.2008.09.098