Measurements of plasma parameters during Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films deposition by double hollow cathode plasma jet system

OLEJNÍČEK, J., HUBIČKA, Z., VIROSTKO, P., DEYNEKA, A., JASTRABÍK, L., ADÁMEK, P., ŠÍCHA, M., TICHÝ, M., ŠÍCHOVÁ, H. Measurements of plasma parameters during Ba_xSr_1-xTiO₃ thin films deposition by double hollow cathode plasma jet system. Czechoslovak Journal of Physics. 2006, 56(Suppl. B), B1283-B1289. ISSN 0011-4626.