Laser Measuring Gauge for Precise Transducer Calibrations in Nanometric Scale

0352197 - ÚPT 2011 RIV CA eng C - Konferenční příspěvek (zahraniční konf.)
Číp, Ondřej - Čížek, Martin - Buchta, Zdeněk - Mikel, Břetislav - Lazar, Josef - Hrabina, Jan
Laser Measuring Gauge for Precise Transducer Calibrations in Nanometric Scale.
Proceedings of the International Conference on Nanotechnology: Fundamentals and Applications. Ottawa: International ASET, 2010, 582: 1-5. ISBN 978-0-9867183-0-4.
[Nanotechnology: Fundamentals and Applications. Ottawa (CA), 04.08.2010-06.08.2010]
Grant CEP: GA MŠMT(CZ) LC06007; GA AV ČR KAN311610701; GA MPO FR-TI1/241; GA ČR GA102/09/1276; GA ČR GAP102/10/1813
Výzkumný záměr: CEZ:AV0Z20650511
Klíčová slova: nanometrology * sensors * distance measurements * measuring gauge
Kód oboru RIV: BH - Optika, masery a lasery

The precise transducers like capacitive, inductive or incremental sensors for distance measurements are used in nanometrology applications very often. They measure 3D position of a cantilever in AFM microscopy stage, they sense thickness of nano-layers or they help us to identify thermal dilatation of nanomaterials. Their main advantages are: lower price than laser interferometers, smaller dimensions and possibility to insert them into very complicated measuring setup. Before installing these sensors for various nanotechnology applications it is necessary to calibrate their scale by high-resolution laser interferometer. Such an interferometer is implemented into special measuring gauge where the investigated sensor is inserted and calibrated. In the work we present new laser measuring system for precise calibrations of length measuring transducers. This gauge is called nano-comparator because the resolution of the positioning of its measuring probe is in order of nanometers.
Trvalý link: http://hdl.handle.net/11104/0191767