Very low energy scanning electron microscopy

0358595 - ÚPT 2012 RIV NL eng J - Článek v odborném periodiku
Frank, Luděk - Hovorka, Miloš - Konvalina, Ivo - Mikmeková, Šárka - Müllerová, Ilona
Very low energy scanning electron microscopy.
Nuclear Instruments & Methods in Physics Research Section A. Roč. 645, č. 1 (2011), s. 46-54. ISSN 0168-9002. E-ISSN 1872-9576
Grant CEP: GA MŠMT OE08012
Výzkumný záměr: CEZ:AV0Z20650511
Klíčová slova: scanning electron microscopy * low energy electrons * cathode lens * very low energy STEM * grain contrast
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Impakt faktor: 1.207, rok: 2011

An overview of recent developments in very low energy scanning electron microscopy is presented. Electron optical aspects are briefly summarized including the low energy beam formation in a cathode lens equipped column, comparison of the sequential and overlapped electric and magnetic fields in the objective lens, and detection issues including extension to the transmitted electron mode as well as to the multichannel detection of signal sorted according to the polar angle of emission. In addition to the acquisition of contrasts specific for the very low energy range, advantages of detection of electrons backscattered to large angles from the surface normal are demonstrated on selected application examples.
Trvalý link: http://hdl.handle.net/11104/0196580