Počet záznamů: 1
Simplified procedure for patterned growth of nanocrystalline diamond micro-structures
- 1.0337500 - FZÚ 2010 RIV CH eng J - Článek v odborném periodiku
Kromka, Alexander - Babchenko, Oleg - Rezek, Bohuslav - Ledinský, Martin - Hruška, Karel - Potměšil, Jiří - Vaněček, Milan
Simplified procedure for patterned growth of nanocrystalline diamond micro-structures.
Thin Solid Films. Roč. 518, č. 1 (2009), s. 343-347. ISSN 0040-6090. E-ISSN 1879-2731
Grant CEP: GA AV ČR KAN400100701; GA AV ČR KAN400100652; GA AV ČR(CZ) IAAX00100902
Výzkumný záměr: CEZ:AV0Z1010921
Klíčová slova: atomic force microscopy * Raman spectroscopy * nanocrystalline diamond * selective diamond growth * seed layer * patterning
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 1.727, rok: 2009
Two technological strategies to generate patterned diamond growth have been tested. The diamond microstructures (i.e. linear stripes and 5 μm narrow channels) were grown in the thickness of 450 nm on Si/SiO2 substrates by a microwave plasma chemical vapor deposition process. The observed results appear promising for the development of directly grown diamond-based transistors.
Trvalý link: http://hdl.handle.net/11104/0181479
Počet záznamů: 1