Energy-resolved mass spectroscopy of Ar-C.sub.2./sub.H.sub.2./sub.-N.sub.2./sub. plasma, performed during ion plating of TiC and Ti N hard coatings

Name: Energy-resolved mass spectroscopy of Ar-C.sub.2./sub.H.sub.2./sub.-N.sub.2./sub. plasma, performed during ion plating of TiC and Ti N hard coatings
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Maček, M.; Mišina, Martin; Čekada, M.; Panjan, P.

Počet záznamů: 1

Energy-resolved mass spectroscopy of Ar-C.sub.2./sub.H.sub.2./sub.-N.sub.2./sub. plasma, performed during ion plating of TiC and Ti N hard coatings

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Maček, M. - Mišina, Martin - Čekada, M. - Panjan, P.
Energy-resolved mass spectroscopy of Ar-C₂H₂-N₂ plasma, performed during ion plating of TiC and Ti N hard coatings.
Surface and Coatings Technology. 174-175, - (2003), s. 943-946. ISSN 0257-8972. E-ISSN 1879-3347.
[International Conference on Plasma Surface Engineering /11./. Garmisch-Partenkirchen, 09.09.2002-13.09.2002]
Impakt faktor: 1.410, rok: 2003
http://hdl.handle.net/11104/0032264

Počet záznamů: 1