0133327 - FZU-D 20010122 RIV DE eng J - Článek v odborném periodiku
Zambov, L. M. - Popov, C. - Plass, M. F. - Bock, A. - Jelínek, Miroslav - Lančok, Ján - Masseli, K. - Kulisch, W.
Capacitance humidity sensor with carbon nitride detecting element.
Applied Physics A - Materials Science & Processing. Roč. 70, - (2000), s. 603-606. ISSN 0947-8396. E-ISSN 1432-0630
Výzkumný záměr: CEZ:AV0Z1010914
Klíčová slova: carbon nitride films * humidity sensor * pulsed laser deposition * inductively coupled plasma chemical vapour deposition
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 1.613, rok: 2000

The humidity sensitive properties of carbon nitride (CNx) films deposited by two methods, inductively coupled chemical vapour deposition utilizing transport reactions and pulsed laser depostion combined with an rf discharge, have been investigated.
Trvalý link: http://hdl.handle.net/11104/0000614