Počet záznamů: 1
Anisotropic carrier transport in preferentially oriented polycrystalline silicon films fabricated by very-high-frequency plasma enhanced chemical vapor deposition using fluorinated source gas
- 1.Nakahata, K., Kamiya, T., Fortmann, C. M., Shimizu, I., Stuchlíková, H., Fejfar, A., Kočka, J. Anisotropic carrier transport in preferentially oriented polycrystalline silicon films fabricated by very-high-frequency plasma enhanced chemical vapor deposition using fluorinated source gas. Journal of Non-Crystalline Solids. 2000, 266-269(-), 341-346. ISSN 0022-3093. E-ISSN 1873-4812.
Počet záznamů: 1