Počet záznamů: 1
Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films
- 1.KADLEC, S., MAČEK, M., WOUTERS, S., NAVINŠEK, B., PAUJAN, P., QUAEYHAEGEIS, C., STALS, L. M. Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films. In: PAVLO, P., ed. International Congres on Plasma Physics. Praha: European Physics Society, 1998, s. 2805-2808. European Conference Abstaracts., 22.
Počet záznamů: 1