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Reactive magnetron sputtering of hard Si-B-C-N films with a high-temperature oxidation resistance
- 1.VLČEK, J., POTOCKÝ, T., ČÍŽEK, J., HOUSKA, J., KORMUNDA, M., ZEMAN, Pavel, PEŘINA, Vratislav, ZEMEK, J., SETSUHARA, Y. Reactive magnetron sputtering of hard Si-B-C-N films with a high-temperature oxidation resistance. Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. 2005, 23(6), 1513-1522. ISSN 0734-2101. E-ISSN 1520-8559.
Počet záznamů: 1