Narrowband laser-based ultrasonic technique for thin film characterization

0422089 - ÚT 2014 JP eng A - Abstrakt
Stoklasová, Pavla - Landa, Michal - Sedlák, Petr - Seiner, Hanuš - Trnka, Jan
Narrowband laser-based ultrasonic technique for thin film characterization.
3rd International Symposium on Laser Ultrasonics and Advanced Sensing. Japan: JSNDI, 2013. s. 44-44.
[LU2013. 25.06.2013-28.06.2013, Yokohama]
Grant CEP: GA ČR GPP101/12/P428; GA ČR(CZ) GA101/09/0702
Institucionální podpora: RVO:61388998
Klíčová slova: laser-based ultrasonic method * thin-layer * spatial light modulator * dispersion curve
Kód oboru RIV: BI - Akustika a kmity

Thin-layer structures can be found in a wide range of applications such as in microelectronics, biotechnology, optics and other areas of technology. The increasing number of existing and potential applications results in an unceasing demand for measuring methods that provide us with material characterization of thin films and coatings. This knowledge is critical for the optimal fabrication of thin-films and the resulting performance of the products with integrated thin-layered components.
Trvalý link: http://hdl.handle.net/11104/0228812