Mn-doped ZnO thin films deposited by spray MOVPE

0373971 - FZÚ 2012 RIV PL eng C - Konferenční příspěvek (zahraniční konf.)
Sofer, Z. - Sedmidubský, D. - Huber, S. - Šaněk, F. - Nádherný, L. - Maryško, Miroslav - Hejtmánek, Jiří - Jurek, Karel - Mikulics, M.
Mn-doped ZnO thin films deposited by spray MOVPE.
EWMOVPE XIV. Wroclaw: Printing house of Wroclaw University of Technology, 2011 - (Prazmowska, J.), s. 83-86. ISBN 978-83-7493-599-9.
[European Workshop on Metalorganic Vapor Phase Epitaxy /14./. Wrocław (PL), 05.06.2011-08.06.2011]
Grant CEP: GA ČR GA104/09/0621
Výzkumný záměr: CEZ:AV0Z10100521
Klíčová slova: ZnO * Mn doping * spintronics * spray MOVPE * magnetism
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

Zinc oxide belongs to wide bandgap semiconductors.When doped by magn. impurities it may become a promising candidate for spintronic applications.The magn. behavior has been reported for layers doped with manganese,iron and other transition metals.However,the thin films growth of high quality layers is difficult due to the violent reaction of oxygen and zinc precursors.The high cost of substrates for homoepitaxial growth represents another problem.In our contribution we present the growth of ZnO and Mn doped ZnO layers by spray pyrolysis MOVPE.Zinc and manganese acetylacetonates and tetramethylheptadionates dissolved in methanol were used as precursors for layer deposition.The precursors were dosed in the reactor by liquid flow controlled and injected to the preheated reactor inlet by ultrasonic nebulizer.The horizontal quartz reactor is equipped with a Hastelloy susceptor and an induction heating system.The influence of deposition condition on the layer properties was investigated.
Trvalý link: http://hdl.handle.net/11104/0006887