Beam shaping and probe characterization in the scanning electron microscope

0543063 - ÚPT 2022 RIV NL eng J - Článek v odborném periodiku
Řiháček, Tomáš - Horák, M. - Schachinger, T. - Mika, Filip - Matějka, Milan - Krátký, Stanislav - Fořt, Tomáš - Radlička, Tomáš - Johnson, C. W. - Novák, L. - Seďa, B. - McMorran, B.J. - Müllerová, Ilona
Beam shaping and probe characterization in the scanning electron microscope.
Ultramicroscopy. Roč. 225, June (2021), č. článku 113268. ISSN 0304-3991. E-ISSN 1879-2723
Grant CEP: GA TA ČR(CZ) TN01000008
Institucionální podpora: RVO:68081731
Klíčová slova: Electron diffraction * SEM * Electron beam structuring * Spot shape measurement * Electron vortex beam
Obor OECD: Particles and field physics
Impakt faktor: 2.994, rok: 2021
Způsob publikování: Open access
https://www.sciencedirect.com/science/article/pii/S0304399121000589

Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.
Trvalý link: http://hdl.handle.net/11104/0320365