Very Low Energy Electron Transmission Spectro-Microscopy

0510315 - ÚPT 2020 DE eng A - Abstrakt
Daniel, Benjamin - Zouhar, Martin - Radlička, Tomáš - Piňos, Jakub - Materna Mikmeková, Eliška - Konvalina, Ivo - Frank, Luděk - Müllerová, Ilona
Very Low Energy Electron Transmission Spectro-Microscopy.
Microscopy Conference: MC 2019. Abstracts. Berlin: DSE, 2019. s. 609-610.
[Microscopy Conference : MC 2019. 01.09.2019-05.09.2019, Berlin]
Grant CEP: GA TA ČR(CZ) TN01000008; GA TA ČR(CZ) TE01020118
Institucionální podpora: RVO:68081731
Klíčová slova: very low energy * electron transmission spectro-microscopy
Obor OECD: Electrical and electronic engineering
https://www.microscopy-conference.de

Scanning Low Energy Electron Microscopy (SLEEM) is a technique that combines an ordinary (low voltage) SEM with a biased specimen stage to form a cathode lens. This allows for specimen imaging using electron energies below 50 eV, while retaining resolution on the nanometer scale.
At such low energies, electron interaction with solids is changed and increased drastically in comparison to usual SEM
with electron energies of at least several keV. The role of the atomic number for material contrast decreases, interactions of the electrons with the local density of states gain importance. As a result the mechanism of contrast formation in SLEEM is quite different and currently not well understood.
Trvalý link: http://hdl.handle.net/11104/0300821