Diamond thin film technologies: nucleation & growth

0487065 - FZÚ 2018 RIV KR eng A - Abstrakt
Kromka, Alexander
Diamond thin film technologies: nucleation & growth.
KIST-CAS-CEITEC Joint Workshop for Nanotechnology and Nanoscience. Seoul: KIST, 2017.
[KIST-CAS-CEITEC Joint Workshop for Nanotechnology and Nanoscience. 03.12.2017-06.12.2017, Seoul]
Grant CEP: GA MŠMT LM2015087; GA ČR(CZ) GBP108/12/G108
Institucionální podpora: RVO:68378271
Klíčová slova: diamond growth * nucleation
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)

The present work encompasses the progress in diamond thin film growth on foreign (non-diamond) substrates at low-pressure using chemical vapor deposition. We will introduce the hybrid HF CVD system with double bias which allows the nucleation by ion bombardment of the conductive substrates at low negative voltages (100÷200 V) where the surface coverage can be simply controlled as the function of process time and process parameters. Next, the ultrasonic seeding employing diamond nanoparticles without/with polymer composite will be pointed out as an effective way to achieve high seeding densities up to 1013 cm-2 and a consequent growth of ultrathin diamond films (<50 nm) on substrates of complex 3D geometries.

Trvalý link: http://hdl.handle.net/11104/0281747