Počet záznamů: 1  

Surface topography measurement by frequency sweeping digital holography.

  1. 1. 0484767 - UFP-V 2018 RIV US eng J - Článek v odborném periodiku
    Lédl, Vít - Psota, Pavel - Kaván, František - Matoušek, Ondřej - Mokrý, Pavel
    Surface topography measurement by frequency sweeping digital holography.
    Applied Optics. Roč. 56, č. 28 (2017), s. 7808-7814. ISSN 1559-128X
    Grant CEP: GA MŠk(CZ) LO1206; GA ČR(CZ) GA16-11965S
    Institucionální podpora: RVO:61389021
    Klíčová slova: Wavelenght Scanning Interferometry * Shape measurement * Profilomerty
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
    Obor OECD: Electrical and electronic engineering
    Impakt faktor: 1.791, rok: 2017

    High-precision measurements of mechanical parts' surface topography represent an essential task in many industry sectors. Examples of such tasks are, e.g., precise alignments of opto-mechanical systems, large object deformation measurements, evaluation of object shape, and many others. Today, the standard method used for such measurements is based on use of coordinate measuring machines (CMMs). Unfortunately, CMMs have severe shortcomings: low measurement point density, long measurement time, risk of surface damage, etc. Indeed, the measurement time rapidly increases with the object complexity and with the density of measurement points. In this paper, we have developed a method for surface topography measurements called 'frequency sweeping digital holography' (FSDH). Our developed FSDH method is based on the principles of wavelength scanning interferometry. It allows surface topography measurements of objects with a diameter of several hundred of mms and a high axial accuracy reaching 10 mu m. The greatest advantage of the presented FSDH is the fact that the surface topology data are captured in a motionless manner by means of a relatively simple setup. This makes the FSDH method a suitable technique for topography measurements of objects with complex geometries made of common materials (such as metals, plastics, etc.), as well as for the characterization of complex composite structures such as acoustic metamaterials, active acoustic metasurfaces, etc. Measurement method principles, setup details, lateral resolution, and axial accuracy are discussed.
    Trvalý link: http://hdl.handle.net/11104/0279917