Počet záznamů: 1  

Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope

  1. 1. 0451582 - UPT-D 2016 RIV US eng J - Článek v odborném periodiku
    Radlička, Tomáš
    Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope.
    Microscopy and Microanalysis. Roč. 21, S4 (2015), s. 212-217 ISSN 1431-9276
    Grant CEP: GA MŠk(CZ) LO1212
    Institucionální podpora: RVO:68081731
    Klíčová slova: scanning electron microscope * optical calculation
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
    Impakt faktor: 1.730, rok: 2015

    A wave optical calculation of the probe size of a low energy scanning electron microscope is presented. The resolution for the optimal aperture was computed and compared with results of standard approaches. The effect of deflection aberrations is also considered, and it was found to be critical for the landing energies below 5eV and fields of view larger than 100 x 100 pím2.
    Trvalý link: http://hdl.handle.net/11104/0252721