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Imaging of dopant distribution in optical fibers with an orthogonal TOF SIMS

  1. 1. 0442464 - URE-Y 2015 RIV GB eng J - Článek v odborném periodiku
    Lorinčík, Jan - Kašík, Ivan - Vaniš, Jan - Sedláček, L. - Dluhoš, J.
    Imaging of dopant distribution in optical fibers with an orthogonal TOF SIMS.
    Surface and Interface Analysis. Roč. 46, č. 1 (2014), s. 238-240. ISSN 0142-2421.
    [19th International Conference on Secondary Ion Mass Spectrometry (SIMS). Jeju, 29.09.2013-04.10.2013]
    Grant ostatní:GA AV ČR(CZ) M100761202
    Institucionální podpora: RVO:67985882
    Klíčová slova: TOF SIMS * Optical fibers * Dopant
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
    Impakt faktor: 1.245, rok: 2014

    The analysis of doping element distribution in optical fiber cross sections requires a sensitive high spatial resolution technique. We demonstrate that a compact orthogonal Time-of-Flight (TOF) mass spectrometer attached to a multitechnique FIB-SEM-EDX system can be used to analyze cross sections of as manufactured optical fibers. By performing quantitative Energy Dispersive X-Ray (EDX) analysis of the optical preform, from which the fibers were drawn, we obtained conversion factors, which enabled the quantification of the Focused Ion Beam(FIB) SIMS profiles of the fiber cross sections
    Trvalý link: http://hdl.handle.net/11104/0245274
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