Počet záznamů: 1  

The effect of grain and pore sizes on the mechanical behavior of thin Al films deposited under different conditions

  1. 1.
    0440919 - UT-L 2016 RIV GB eng J - Článek v odborném periodiku
    Ben-David, E. - Landa, Michal - Janovská, Michaela - Seiner, Hanuš - Gutman, O. - Tepper-Faran, T. - Shilo, D.
    The effect of grain and pore sizes on the mechanical behavior of thin Al films deposited under different conditions.
    Acta Materialia. Roč. 87, April (2015), s. 321-331. ISSN 1359-6454
    Grant ostatní:Rada Programu interní podpory projektů mezinárodní spolupráce AV ČR(CZ) M100761203
    Program:M
    Institucionální podpora: RVO:61388998
    Klíčová slova: thin films * mechanical properties * tensile tests * bulge tests * porosity
    Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
    Impakt faktor: 5.058, rok: 2015
    http://www.sciencedirect.com/science/article/pii/S1359645414009677

    This paper presents a comprehensive study of the relationships between deposition conditions, microstructure and mechanical behavior in thin aluminum films commonly used in micro and nano-devices. A particular focus is placed on the effect of porosity, which is present in all thin films deposited by evaporation or sputtering techniques.
    Trvalý link: http://hdl.handle.net/11104/0244040