Počet záznamů: 1  

A Comparison of Different Measurement Method of Mechanical Properties of Al Thin Film

  1. 1.
    0437883 - ÚPT 2015 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
    Truhlář, M. - Buršíková, V. - Sobota, Jaroslav - Kruml, Tomáš
    A Comparison of Different Measurement Method of Mechanical Properties of Al Thin Film.
    NANOCON 2014. 6th International conference proceedings. Ostrava: TANGER, 2014. ISBN 978-80-87294-55-0.
    [NANOCON 2014. International Conference /6./. Brno (CZ), 05.11.2014-07.11.2014]
    Grant CEP: GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
    Institucionální podpora: RVO:68081731 ; RVO:68081723
    Klíčová slova: microcompression * nanoindentation * mechanical properties * Young moduls
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

    The paper compares two different methods for testing of metallic thin films: microcompression test and nanoindentation. Microcompression test is one possibility how to perform mechanical tests on a very small scale. This method requires preparation of a small cylindrical specimen (micropillar) of micrometric size by FIB and execution of a compression test using nanoindenter device equipped with a flat diamond punch. Stressstrain curves of the thin films were obtained from such tests. Nanoindentation tests were then conducted to compare the results on the same films. Two different metal thin films – AlCuW, AlCuSi with thickness 2 .mu.m and grain size 3.8 .mu.m in average were prepared by PVD method. In this paper, we announce the results of measurements, a comparison of the results obtained by each method and identify advantages and limitations of the methods.
    Trvalý link: http://hdl.handle.net/11104/0241406

     
     
Počet záznamů: 1  

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