Počet záznamů: 1  

Measurement of Young’s modulus and volumetric mass density/thickness of ultrathin films utilizing resonant based mass sensors

  1. 1.
    0433721 - FZÚ 2015 RIV US eng J - Článek v odborném periodiku
    Stachiv, Ivo - Vokoun, David - Jeng, Y.-R.
    Measurement of Young’s modulus and volumetric mass density/thickness of ultrathin films utilizing resonant based mass sensors.
    Applied Physics Letters. Roč. 104, č. 8 (2014), "083102-1"-"083102-4". ISSN 0003-6951. E-ISSN 1077-3118
    Grant CEP: GA ČR GAP107/12/0800
    Institucionální podpora: RVO:68378271
    Klíčová slova: functional films * mass sensor * resonant frequency
    Kód oboru RIV: JB - Senzory, čidla, měření a regulace
    Impakt faktor: 3.302, rok: 2014
    http://scitation.aip.org/content/aip/journal/apl/104/8/10.1063/1.4866417

    By detecting the resonant frequency shift caused by an attached particle before and after film deposition, the Young’s modulus and either mass density or thickness of a patterned thin film can be determined. Furthermore, for a film characterization, the particle mass does not need to be known and its attachment position can be either measured or calculated from consecutive resonant frequency shifts: two for bridge and three for cantilever. The applicability of mass sensors in film characterization has been confirmed by comparing predictions with recent experiments.
    Trvalý link: http://hdl.handle.net/11104/0237873

     
     
Počet záznamů: 1  

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