Growth of carbon allotropes and plasma characterization in linear antenna microwave plasma CVD system

0432261 - FZÚ 2015 RIV JP eng J - Článek v odborném periodiku
Potocký, Štěpán - Babchenko, Oleg - Davydova, Marina - Ižák, Tibor - Čada, Martin - Kromka, Alexander
Growth of carbon allotropes and plasma characterization in linear antenna microwave plasma CVD system.
Japanese Journal of Applied Physics. Roč. 53, č. 5 (2014), "05FP04-1"-"05FP04-3". ISSN 0021-4922. E-ISSN 1347-4065
Grant CEP: GA TA ČR TA01011740; GA ČR GAP205/12/0908
Grant ostatní: AVČR(CZ) M100100902
Institucionální podpora: RVO:68378271
Klíčová slova: antenna linear * CVD system * plasma
Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech
Impakt faktor: 1.127, rok: 2014

Growth of diamond coatings with tunable morphology and concurrent substrate catalyst pretreatment and further growth of carbon nanotubes were studied. The dependence of plasma parameters on gas composition was studied by Langmuir probe measurement. Grown diamond coatings and carbon nanotubes were characterized by scanning electron microscopy and Raman spectroscopy and correlated with process parameters. Well-defined nanocrystalline, polycrystalline, and porous diamond films were prepared. Concurrent substrate catalyst pretreatment and further growth of carbon nanotubes were shown.
Trvalý link: http://hdl.handle.net/11104/0236689