Počet záznamů: 1
Characterization of microwave surface wave plasma in linear configuration and growth of nano-sized carbon allotropes
- 1.0424263 - FZÚ 2014 DE eng A - Abstrakt
Potocký, Štěpán - Čada, Martin - Babchenko, Oleg - Ižák, Tibor - Davydova, Marina - Rezek, Bohuslav - Kromka, Alexander
Characterization of microwave surface wave plasma in linear configuration and growth of nano-sized carbon allotropes.
537. WE Heraeus Seminar. Physics of Ionized and Ion-Assisted PVD: Principles and Current Trends. Dresden: Wilhelm und Else Heraeus-Stiftung, 2013 - (Gemming, S.; Abrasonis, G.; Vinnichenko, M.). s. 75-76
[WE-Heraeus-Seminar /537./ - Physics of Ionized and Ion-Assisted PVD: Principles and Current Trends. 26.06.2013-28.06.2013, Dresden]
Grant CEP: GA TA ČR TA01011740; GA MŠMT(CZ) LM2011026; GA ČR GAP205/12/0908
Institucionální podpora: RVO:68378271
Klíčová slova: microwave plasma * CVD deposition
Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech
Recently design and optimization of the microwave plasma CVD techniques has reached matured state. Design and optimization of microwave plasma reactors is dominated by high pressure systems (10 to 100kPa).
Trvalý link: http://hdl.handle.net/11104/0230378
Počet záznamů: 1