Perspectives in diamond thin film technology

0398413 - FZÚ 2014 CZ eng K - Konferenční příspěvek (tuzemská konf.)
Kromka, Alexander
Perspectives in diamond thin film technology.
Proceedings of the 3rd Winter Education Seminar in Rokytnice nad Jizerou 2012. Praha: FZÚ AV ČR, v.v.i, 2012 - (Hoďáková, L.; Remeš, Z.; Kromka, A.; Ledinský, M.), s. 50-65. ISBN 978-80-260-3425-4.
[Winter Education Seminar /3. /. Rokytnice nad Jizerou (CZ), 01.02.2012 -04.02. 2012]
Grant CEP: GA ČR(CZ) GBP108/12/G108; GA AV ČR(CZ) IAAX00100902
Institucionální podpora: RVO:68378271
Klíčová slova: nanocrystalline diamond * nucleation of NCD * growth of NCD * MW-PECVD
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

Synthetic diamond thin films are routinely grown over world not only for basic research but also for industrial uses. At the Institute of Physics (IoP), diamond thin films are grown since 2002. The first installed deposition system is base on microwave plasma enhanced chemical vapor deposition (CVD) in hydrogen reach gas mixture (<2% methane diluted in hydrogen). This system is well suitable for fast growth of high quality diamond films up to 5 cm in diameter. The main advance of the system is cavity like resonator which allows running stable CVD process for several days at relatively high pressures (>200 mbar).
Trvalý link: http://hdl.handle.net/11104/0225882