Study of nucleation and growth of diamond thin films

0398364 - FZÚ 2014 CZ eng K - Konferenční příspěvek (tuzemská konf.)
Ižák, Tibor - Babchenko, Oleg - Varga, Marián - Potocký, Štěpán - Marton, M. - Vojs, M. - Domonkos, Mária - Kromka, Alexander
Study of nucleation and growth of diamond thin films.
Proceedings of the 3rd Winter Education Seminar in Rokytnice nad Jizerou 2012. Praha: FZÚ AV ČR, v.v.i, 2012 - (Hoďáková, L.; Remeš, Z.; Kromka, A.; Ledinský, M.), s. 39-49. ISBN 978-80-260-3425-4.
[Winter Education Seminar /3. /. Rokytnice nad Jizerou (CZ), 01.02.2012 -04.02. 2012]
Grant CEP: GA ČR(CZ) GBP108/12/G108
Institucionální podpora: RVO:68378271
Klíčová slova: nanocrystalline diamond * nucleation of NCD * growth of NCD * MW-PECVD
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

This study deals with the nucleation and growth of CVD diamond films on Si substrates. In nucleation part two different nucleation methods were studied: (i) the bias enhanced nucleation (BEN) and (ii) ultrasonic seeding. In the case of BEN, (i) the nucleation time and (ii) the influence of bias voltage were studied. For ultrasonic seeding the effect of different solutions of ultradisperzed detonation nanodiamond (UDD) powder with metal particles on the nucleation efficiency and growth process was investigated (i.e. diamond powder, nanosized Ni, microsized Co and Y metal powders).
Trvalý link: http://hdl.handle.net/11104/0225846